Open Source Plasma Cleaner

Basics

• A device that cleans off stuff using plasma (plus things listed below) in a low pressure gas enviroment (using a vacuum pump and a radio tranmitter)
• Uses a mixture plasma, light, and things like ozone, not just plasma, all are created by the same process (the ionization of the low pressure gas) and thus it is called a plasma cleaner

Used For

• Silicon Wafer Cleaning
• It can also be modified to be used as an etchant (with more power) in the Open Source Photolithography System , re Plasma Etching
• Other instances of Critical Cleaning requiring the level of low contaminants Plama Cleaning can provide

Industry Standards

• This Tabletop One

Existing Open Source Designs

• This one by the youtube channel "Applied Science"

Basic Design

Gas Input

• Can add special atmospheres such as oxygen, hydrogen, or argon
• Can improve or otherwise modify cleaning profiles by doing so

Internal Links

• Open Source High Vacuum Chamber
  • Open Source Ultra-High Vacuum Chamber (Mostly the same short of using Metal Gaskets made of Oxygen Free Copper in special CF Flanges )

External Links

• Wikipedia Page on Plasma Cleaning
• Applied Science Video on Plasma Cleaning, a definit must watch